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Fabrication of semiconductors and integrated circuits (ICs) is arguably one of the most advanced manufacturing processes ever developed. A state-of-the-art IC requires a ultra clean environment, ultra pure chemicals and gases, highly sophisticated fabrication tools, and a team with extensive knowledge of chemical engineering, semiconductor physics, modeling, and logistics management. The materials in this section cover the main disciplines or steps used in semiconductor fabrication. They include:

  • Growth and preparation of the starting material (Si, GaAs, or other semiconductor materials)
  • Diffusion
  • Oxidation
  • Cleaning
  • Ion Implantation
  • Lithography
  • Chemical Vapor Deposition
  • Physical Vapor Deposition
  • Chemical Mechanical Planarization

Please click on the topics to the left to begin learning about this fascinating process.