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Fabrication of semiconductors and integrated circuits (ICs) is arguably one of the most advanced manufacturing processes ever developed. A state-of-the-art IC requires a ultra clean environment, ultra pure chemicals and gases, highly sophisticated fabrication tools, and a team with extensive knowledge of chemical engineering, semiconductor physics, modeling, and logistics management. The materials in this section cover the main disciplines or steps used in semiconductor fabrication. They include:
- Growth and preparation of the starting material (Si, GaAs, or other semiconductor materials)
- Diffusion
- Oxidation
- Cleaning
- Ion Implantation
- Lithography
- Chemical Vapor Deposition
- Physical Vapor Deposition
- Chemical Mechanical Planarization
Please click on the topics to the left to begin learning about this fascinating process.